Valve Overhaul

適用製造商：
SMC、VAT、AMAT、MKS、Millipore、VEXTE、MDC、Nor-cal、IKC

Slit Valve

VAT Slit Valve Overhaul SMC Slite Valve Overhaul       SMC 200mm L-motion Valve SMC P/N：                       Chamber                           02-121427-00                60-149991-00              Load-lock                         02-133793-00             60-133798-00

SMC Slite Valve Overhaul AMAT Slite Valve Overhaul SMC 300mm L-motion Valve SMC P/N：60-151975-00  Producer-II 200mm Slit Valve   0400-75862 Endura 200mm Slit Valve 0010-76482   |   0020-20345 0010-75172   |   0010-15287 0010-76428   |   0010-01360 0010-01365   |   0010-20021 0010-26966   |   0010-70411 0010-75035   |   0010-76392 Endura 300mm Slit Valve 0010-34370   |   0010-03051 0010-06002   |   0010-14018 0010-13368   |   0010-13369 0010-13970

Isolation Valve

MKS Isolation Valve Overhaul Instruments HPS 162-0040K Inline Pneumatic Valve 163-1063-24VDC LPV1-125-AK 161-0040C

MKS Isolation Valve Overhaul		MDC Isolation Valve Overhaul
152-0063P	151-0025K	MDC Angle Valve KAV150P(AMAT 3870-01334)	Manual Angle Valve KAV-100

Nor-Cal Isolation Valve Overhaul		SMC Isolation Valve Overhaul
ESVP-2002-NWB	In-Line Valve(NW50) ILVP-2002-NWB	High Vacuum Valve (Dual Bellows) Model：          XLD-40 XLD-50 XLD-80   XLD-100	High Vacuum Valve (Single Bellow) Model：             XLA-80

MKS HPS Product	Varian Isolation Valve Overhaul
AKT 4300/5500 P/N：0010-1576-02R	NW16 Angle Valve P/N：L9181301	NW25 Angle Valve P/N：L6281802	NW80 Angle Valve

Throttle Valve

MKS Throttle Valve Overhaul AMAT Valve Overhaul 253B Series 253B Series 253A Series P5000 PECVD

Gate Valve

VAT Gate Valve Overhaul
14036-PE24	64246-PE52 64246-UE52 64246-EX52	10846-XE28	12040-PA24

VAT Gate Valve Overhaul
12044-PA24	01028 01032 01034