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PVD Process Kits
| Clamp Ring |
Cover Ring |
Pedestal |
Shutter Disk |
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| 6" & 8" |
8" |
8" |
8" & 12" |
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TxZ Process Kits
| Lid Plate |
Adapter |
Plate |
Plate |
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| BKM1 Enhanced 200mm |
Material : AL & SUS |
PERF, 8" EC |
Blocker |
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CMP Process Kits
| Retainer Ring |
Guide Ring |
Idler Roller |
Driver Roller |
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| 8" & 12" |
8" & 12" |
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Etch Process Kits
| Baffle Plate |
Upper Electrode |
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Other Process Kits
| Throttle Valve |
Chamber A & B |
Shower Head |
IMP Chamber Coil |
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| 鐵氟龍製品 Plug |
12" View Port Double O-ing |
CVD Process |
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| Blade |
PFA Cassette |
Metal Cassette |
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鐵氟龍 |
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Heater Refurbishment
| xZ Heater Pedestal Refurbishment |
Gasonics PEP Platen Refurbishment |
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