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Quartz Kits

CEILING560 Plate Cover Segments Plate Tension Disc Star Plate
MOCVD 2800G4HT MOCVD 2800G4HT MOCVD 2800G4HT MOCVD 2800G4HT

Sleeve(Upper) Sleeve(Below) Support J-Liner
MOCVD 2600G3 MOCVD 2600G3 MOCVD 31*2" MOCVD 19*2"

J-Liner(Molybdenum) Supporting Disc Pull Down Pad Supporting Tube
MOCVD 31*2"      

Nozzle Quartz Tube Quartz Vacuum Adsorber Quartz Injection Cone
       

Quartz UV Table Quartz Exhaust Tube Quartz Tube Wafer Boat
      2"

Wafer Boat Wafer Boat Wafer Boat Wafer Boat
2" 3" 4" 4"

Quartz Cover of
Diffusion Furnace Tube
     
       


Metal Kits

Gun Body Wafer Cover Backing Plate of Target Copper(Cu) Cruible
  2" & 4"    

Molybdenum(Mo) Crucible Crucible Fixture Sorrounding Ring for
Deposition Free
Robot Blade
       

Distribution Plate     E-Gun Injector
       

       
       

       
       


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