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Quartz Kits
| CEILING560 Plate |
Cover Segments Plate |
Tension Disc |
Star Plate |
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| MOCVD 2800G4HT |
MOCVD 2800G4HT |
MOCVD 2800G4HT |
MOCVD 2800G4HT |
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| Sleeve(上座) |
Sleeve(下座) |
Support |
J-Liner |
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| MOCVD 2600G3 |
MOCVD 2600G3 |
MOCVD 31*2" |
MOCVD 19*2" |
| J-Liner(鉬材質) |
Supporting Disc |
Pull Down Pad |
Supporting Tube |
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| MOCVD 31*2" |
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| Nozzle |
Quartz Tube |
Quartz 真空吸附器 |
Quartz Injection Cone |
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| Quartz UV Table |
Quartz Exhaust Tube |
Quartz Tube |
Wafer Boat |
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2" |
| Wafer Boat |
Wafer Boat |
Wafer Boat |
Wafer Boat |
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| 2" |
3" |
4" |
4" |
Metal Kits
| Gun Body |
晶片蓋 |
靶材背板 |
銅坩鍋 |
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2" & 4" |
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鉬坩鍋 |
鍍鍋固定座 |
防鍍圈 |
Robot Blade |
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